Langzeitstabilität der Innendrücke von Kavernen benachbarter MEMS-Sensoren auf Siliziumbasis

Due to a trend towards miniaturization of many MEMS devices and thus also the cavity volumes of inertial sensors, the influence of slight changes in the damping atmosphere in sensor cavities on the reliability of the sensors is increasing. In this work, mechanisms affecting the pressure stability of...

Deskribapen osoa

Xehetasun bibliografikoak

Egile nagusia:	Kopf, Marlene
Formatua:	Online
Hizkuntza:	alemana
Argitaratua:	KIT Scientific Publishing 2022
Gaiak:	MEMS-Sensor Drehratensensor Inertialsensor Dämpfung Q-Faktor MEMS sensor gyroscope inertial sensor damping atmosphere Q factor thema EDItEUR::T Technology, Engineering, Agriculture, Industrial processes::TG Mechanical engineering and materials
Sarrera elektronikoa:	ONIX_20220404_9783731511212_6
Etiketak:	Etiketa erantsi Etiketarik gabe, Izan zaitez lehena erregistro honi etiketa jartzen!