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MEMS/NEMS Sensors: Fabrication and Application

Due to the ever-expanding applications of micro/nano-electromechanical systems (NEMS/MEMS) as sensors and actuators, interest in their development has rapidly expanded over the past decade. Encompassing various excitation and readout schemes, the MEMS/NEMS devices transduce physical parameter change...

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Main Authors: Koley, Goutam, Jahangir, Ifat
Format: Online
Language:English
Published: MDPI - Multidisciplinary Digital Publishing Institute 2021
Subjects:
TA1-2040
T1-995
vibrating ring gyroscope
n/a
tunnel magnetoresistive effect
optical sensor
micro-NIR spectrometer
pulse inertia force
gas sensor
wet etching
oil detection
glass welding
spring design
power consumption
MEMS (micro-electro-mechanical system)
back cavity
deflection position detector
magnetic
MEMS
single-layer SiO2
frequency tuning
threshold accuracy
suspended micro hotplate
AlGaN/GaN circular HFETs
quadrature modulation signal
inertial switch
nanoparticle sensor
low noise
photonic crystal nanobeam cavity
floating slug
infrared image
backstepping approach
microdroplet
acceleration switch
microgyroscope
temperature uniformity
methane
microfluidic
accelerometer design
photonic crystal cavity
anisotropy
resonant frequency
dual-mass MEMS gyroscope
analytical model
single crystal silicon
temperature sensor
micro fluidic
refractive index sensor
microwave measurement
low zero-g offset
femtosecond laser
micropellistor
rapid fabrication
accelerometer
tracking performance
GaN diaphragm
microactuator
resistance parameter
optomechanical sensor
scanning grating mirror
GaAs MMIC
adaptive control
frequency split
frequency mismatch
electrostatic force feedback
thermoelectric power sensor
squeeze-film damping
silicon
wideband
Accelerometer readout
bonding strength
high temperature pressure sensors
3D simulation
level-set method
tetramethylammonium hydroxide (TMAH)
thema EDItEUR::T Technology, Engineering, Agriculture, Industrial processes::TB Technology: general issues::TBX History of engineering and technology
Online Access:42715
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