Micromachining Techniques for Fabrication of Micro and Nano Structures

Micromachining is used to fabricate three-dimensional microstructures and it is the foundation of a technology called Micro-Electro-Mechanical-Systems (MEMS). Bulk micromachining and surface micromachining are two major categories (among others) in this field. This book presents advances in micromac...

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Aineistotyyppi:	Online
Kieli:	englanti
Julkaistu:	IntechOpen 2021
Aiheet:	Analytical chemistry thema EDItEUR::P Mathematics and Science::PN Chemistry
Linkit:	ONIX_20210420_9789533079066_873
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