Micromachining Techniques for Fabrication of Micro and Nano Structures
Micromachining is used to fabricate three-dimensional microstructures and it is the foundation of a technology called Micro-Electro-Mechanical-Systems (MEMS). Bulk micromachining and surface micromachining are two major categories (among others) in this field. This book presents advances in micromac...
Kaydedildi:
| Materyal Türü: | Online |
|---|---|
| Dil: | İngilizce |
| Baskı/Yayın Bilgisi: |
IntechOpen
2021
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| Konular: | |
| Online Erişim: | ONIX_20210420_9789533079066_873 |
| Etiketler: |
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