Micromachining Techniques for Fabrication of Micro and Nano Structures
Micromachining is used to fabricate three-dimensional microstructures and it is the foundation of a technology called Micro-Electro-Mechanical-Systems (MEMS). Bulk micromachining and surface micromachining are two major categories (among others) in this field. This book presents advances in micromac...
Salvato in:
| Natura: | Online |
|---|---|
| Lingua: | inglese |
| Pubblicazione: |
IntechOpen
2021
|
| Soggetti: | |
| Accesso online: | ONIX_20210420_9789533079066_873 |
| Tags: |
Nessun Tag, puoi essere il primo ad aggiungerne!!
|