Piezoelectric MEMS

Electromechanical transducers based on piezoelectric layers and thin films are continuously finding their way into micro-electromechanical systems (MEMS). Piezoelectric transducers feature a linear voltage response, no snap-in behavior and can provide both attractive and repulsive forces. This remov...

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Bibliographic Details

Main Authors:	Ulrich Schmid (Ed.), Michael Schneider (Ed.)
Format:	Online
Language:	English
Published:	MDPI - Multidisciplinary Digital Publishing Institute 2021
Subjects:	TK1-9971 Piezoelectric MEMS resonators Piezoelectric materials Acoustic MEMS devices Surface acoustic wave devices Smart electronics for piezoelectric devices and systems Piezoelectric energy harvesting Packaging of piezoelectric MEMS Simulation and modeling of piezoelectric MEMS thema EDItEUR::K Economics, Finance, Business and Management::KN Industry and industrial studies::KNB Energy industries and utilities
Online Access:	27296
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