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Piezoelectric Aluminium Scandium Nitride (AlScN) Thin Films: Material Development and Applications in Microdevices

Recently, aluminium scandium nitride (AlScN) emerged as a material with superior properties compared to aluminium nitride (AlN). Substituting Al with Sc in AlN leads to a dramatic increase in the piezoelectric coefficient as well as in electromechanical coupling. This discovery finally allowed us to...

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Format: Online
Language:English
Published: MDPI - Multidisciplinary Digital Publishing Institute 2023
Subjects:
AlN
AlScN
aluminum nitride
aluminum scandium nitride
micromirror
microscanner
piezoelectric
aluminium scandium nitride
piezoelectric thin films
MEMS
non-metallic substrates
scandium-doped aluminum nitride
ferroelectric
substrate-RF
residual stress
coercive field
leakage current
high temperature
nonvolatile memory
retention
fatigue
wurtzite
film
sputter deposition
scandium–aluminum nitride
Lamb-wave resonators
complementary switchable
SAW devices
piezoelectricity
ScAlN thin film
diamond thin film
5G technology
electromechanical coupling coefficient k2
Q-factor
aluminum scandium nitride (AlScN)
aluminum nitride (AlN)
wet etch
potassium hydroxide (KOH)
physical vapor deposition
stress
stress gradient
fabrication
cantilever beams
thermal stability
structure analysis
X-ray diffraction
ferroelectrics
thin film
PUND test
laser ultrasound
surface acoustic waves
magnetron sputter epitaxy
elastic properties
thin films
piezoelectric films
Raman spectroscopy
alloy scattering
temperature coefficient
n/a
thema EDItEUR::G Reference, Information and Interdisciplinary subjects::GP Research and information: general
thema EDItEUR::P Mathematics and Science::PH Physics
Online Access:ONIX_20230714_9783036563671_65
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