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Micromachined Acoustic Transducers for Audio-Frequency Range

Microelectromechanical systems (MEMSs) and acoustics have become inseparable disciplines. MEMS microphones have become one of the most successful commercial products in the history of microsystem technology. In recent years, MEMS speakers have garnered significant interest from both research and ind...

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Format: Online
Language:English
Published: MDPI - Multidisciplinary Digital Publishing Institute 2025
Subjects:
microphone array
turbulent boundary layer
Kapton foil
flight test
wave number decomposition
propeller
spatial resolution
flexible circuit board
microelectromechanical systems
MEMS
loudspeakers
microspeakers
piezoelectric
loudspeaker
total harmonic distortion
state space
IEC 711
thin film
PZT
capacitive microphone
finite element modeling
reduced order modeling
effective area
peripheral protrusion
center protrusion
serpentine spring
implantable acoustic transducer
packaging
titanium/platinum multi-layer diaphragm
polymer sacrificial material
DC magnetron sputtering
intrinsic stress
stress measurement
stress relief
PiezoMUMPs
acoustic transducer
tunable
resonant frequency
finite element modelling
speaker
imprint
bipolar driving
analytical modeling
electroacoustic transducers
MEMS microphones
perforated plate
aeroacoustics
piezoelectric transducer
microphone
AOP
design
sensitivity control
acoustic transmission
characterization
MEMS transducer
modeling
folded diaphragm
n/a
thema EDItEUR::T Technology, Engineering, Agriculture, Industrial processes::TB Technology: general issues::TBX History of engineering and technology
thema EDItEUR::K Economics, Finance, Business and Management::KN Industry and industrial studies::KNB Energy industries and utilities
Online Access:ONIX_20250812T095121_9783725832668_100
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