Optical MEMS

Optical microelectromechanical systems (MEMS), microoptoelectromechanical systems (MOEMS), or optical microsystems are devices or systems that interact with light through actuation or sensing at a micro- or millimeter scale. Optical MEMS have had enormous commercial success in projectors, displays,...

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Bibliografiset tiedot
Päätekijät:	Zamkotsian, Frederic, Xie, Huikai
Aineistotyyppi:	Online
Kieli:	englanti
Julkaistu:	MDPI - Multidisciplinary Digital Publishing Institute 2021
Aiheet:	TA1-2040 T1-995 stray light input shaping n/a wavefront sensing signal-to-noise ratio (SNR) LC micro-lenses controlled electrically infrared intraoperative microscope MEMS mirror MLSSP ocular aberrations MEMS scanning micromirror electrothermal actuation electrothermal bimorph open-loop control wavelength dependent loss (WDL) NIR fluorescence infrared Fabry–Perot (FP) filtering two-photon resonant MEMS scanner residual oscillation 3D measurement parametric resonance digital micromirror device quality map metalens flame retardant 4 (FR4) angle sensor optical switch metasurface vibration noise optical coherence tomography spectrometer reliability quasistatic actuation Huygens’ metalens confocal large reflection variations electrostatic dual-mode liquid-crystal (LC) device field of view (FOV) scanning micromirror fluorescence confocal variable optical attenuator (VOA) micro-electro-mechanical systems (MEMS) microscanner laser stripe width polarization dependent loss (PDL) fringe projection 2D Lissajous usable scan range laser stripe scanning bio-optical imaging MEMS scanning mirror digital micromirror device (DMD) Cu/W bimorph echelle grating achromatic DMD chip tunable fiber laser programmable spectral filter higher-order modes electromagnetic actuator thema EDItEUR::T Technology, Engineering, Agriculture, Industrial processes::TB Technology: general issues::TBX History of engineering and technology
Linkit:	42468
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Optical MEMS

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