Micro/Nano Manufacturing

Micro- and nano-scale manufacturing has been the subject of ever more research and industrial focus over the past 10 years. Traditional lithography-based technology forms the basis of micro-electro-mechanical systems (MEMS) manufacturing, but also precision manufacturing technologies have been devel...

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Bibliographic Details
Main Authors: Hans Nørgaard Hansen (Ed.), Guido Tosello (Ed.)
Format: Online
Language:English
Published: MDPI - Multidisciplinary Digital Publishing Institute 2021
Subjects:
Online Access:24933
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