Micro/Nano Manufacturing
Micro- and nano-scale manufacturing has been the subject of ever more research and industrial focus over the past 10 years. Traditional lithography-based technology forms the basis of micro-electro-mechanical systems (MEMS) manufacturing, but also precision manufacturing technologies have been devel...
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| Auteurs principaux: | , |
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| Format: | Online |
| Langue: | anglais |
| Publié: |
MDPI - Multidisciplinary Digital Publishing Institute
2021
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| Sujets: | |
| Accès en ligne: | 24933 |
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