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Chemical Vapor Deposition

This book provides an overview of chemical vapor deposition (CVD) methods and recent advances in developing novel materials for application in various fields. CVD has now evolved into the most widely used technique for growth of thin films in electronics industry. Several books on CVD methods have e...

Повний опис

Збережено в:
Формат: Online
Мова:Англійська
Опубліковано: IntechOpen 2023
Предмети:
thin films, chemical vapour deposition, carbon nanotubes, polymers, composite, photoluminescence
thema EDItEUR::P Mathematics and Science::PN Chemistry::PNR Physical chemistry::PNRS Solid state chemistry
Онлайн доступ:ONIX_20231201_9789535125730_552
Теги: Додати тег
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Резюме:This book provides an overview of chemical vapor deposition (CVD) methods and recent advances in developing novel materials for application in various fields. CVD has now evolved into the most widely used technique for growth of thin films in electronics industry. Several books on CVD methods have emerged in the past, and thus the scope of this book goes beyond providing fundamentals of the CVD process. Some of the chapters included highlight current limitations in the CVD methods and offer alternatives in developing coatings through overcoming these limitations.

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