Chemical Vapor Deposition

This book provides an overview of chemical vapor deposition (CVD) methods and recent advances in developing novel materials for application in various fields. CVD has now evolved into the most widely used technique for growth of thin films in electronics industry. Several books on CVD methods have e...

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Formato: Online
Idioma:inglês
Publicado em: IntechOpen 2023
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Acesso em linha:ONIX_20231201_9789535125730_552
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