Chemical Vapor Deposition

This book provides an overview of chemical vapor deposition (CVD) methods and recent advances in developing novel materials for application in various fields. CVD has now evolved into the most widely used technique for growth of thin films in electronics industry. Several books on CVD methods have e...

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Bibliographic Details
Format: Online
Language:English
Published: IntechOpen 2023
Subjects:
Online Access:ONIX_20231201_9789535125730_552
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