Advances in Micro/Nano Electromechanical Systems and Fabrication Technologies

MEMS technology is increasingly penetrating into our lives and improving our quality of life. In parallel to this, advances in nanotechnology and nanomaterials have been catalyzing the rise of NEMS. Consisting of nine chapters reviewing state-of-the-art technologies and their future trends, this boo...

詳細記述

保存先:
書誌詳細
フォーマット: Online
言語:英語
出版事項: IntechOpen 2021
主題:
オンライン・アクセス:ONIX_20210420_9789535110859_1900
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