Advances in Micro/Nano Electromechanical Systems and Fabrication Technologies

MEMS technology is increasingly penetrating into our lives and improving our quality of life. In parallel to this, advances in nanotechnology and nanomaterials have been catalyzing the rise of NEMS. Consisting of nine chapters reviewing state-of-the-art technologies and their future trends, this boo...

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Médium: Online
Jazyk:angličtina
Vydáno: IntechOpen 2021
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On-line přístup:ONIX_20210420_9789535110859_1900
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