Microelectromechanical Systems and Devices

The advances of microelectromechanical systems (MEMS) and devices have been instrumental in the demonstration of new devices and applications, and even in the creation of new fields of research and development: bioMEMS, actuators, microfluidic devices, RF and optical MEMS. Experience indicates a nee...

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Format: Online
Idioma:anglès
Publicat: IntechOpen 2021
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Accés en línia:ONIX_20210420_9789535103066_1260
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