Advances in Unconventional Lithography

The term Lithography encompasses a range of contemporary technologies for micro and nano scale fabrication. Originally driven by the evolution of the semiconductor industry, lithography has grown from its optical origins to demonstrate increasingly fine resolution and to permeate fields as diverse a...

Täydet tiedot

Tallennettuna:
Bibliografiset tiedot
Aineistotyyppi: Online
Kieli:englanti
Julkaistu: IntechOpen 2021
Aiheet:
Linkit:ONIX_20210420_9789533076072_642
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