Advances in Unconventional Lithography

The term Lithography encompasses a range of contemporary technologies for micro and nano scale fabrication. Originally driven by the evolution of the semiconductor industry, lithography has grown from its optical origins to demonstrate increasingly fine resolution and to permeate fields as diverse a...

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Dettagli Bibliografici
Natura: Online
Lingua:inglese
Pubblicazione: IntechOpen 2021
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Accesso online:ONIX_20210420_9789533076072_642
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