Development of CMOS-MEMS/NEMS Devices

Micro and nano-electro-mechanical system (M/NEMS) devices constitute key technological building blocks to enable increased additional functionalities within Integrated Circuits (ICs) in the More-Than-Moore era, as described in the International Technology Roadmap for Semiconductors. The CMOS ICs and...

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Bibliografiske detaljer
Main Authors:	Verd, Jaume, Segura, Jaume
Format:	Online
Sprog:	engelsk
Udgivet:	MDPI - Multidisciplinary Digital Publishing Institute 2021
Fag:	TA1-2040 T1-995 encapsulation n/a NEM memory switch magnetotransistor gas sensor nano-system array metal oxide (MOX) sensor capacitive pressure sensor real-time temperature compensation loop mechanical relays single-crystal silicon (SC-Si) MEMS relays MEMS oscillator micro-electro-mechanical system (MEMS) uncooled IR-bolometer microelectromechanical systems microbolometer programmable sustaining amplifier micro sensor CMOS-MEMS pierce oscillator MEMS resonators micro/nanoelectromechanical systems (MEMS/NEMS) resonator microhotplate NEMS application-specific integrated circuit (ASIC) MEMS modelling magnetic field chopper instrumentation amplifier microresonators interface circuit Hall effect thermal detector temperature sensor infrared sensor CMOS–NEMS CMOS atomic force microscope MEMS switches stent micro-electro-mechanical systems (MEMS) sensors nano resonator silicon-on-insulator (SOI) MEMS-ASIC integration Sigma-Delta MEMS characterization high-Q capacitive accelerometer mass sensors M3D thema EDItEUR::T Technology, Engineering, Agriculture, Industrial processes::TB Technology: general issues::TBX History of engineering and technology
Online adgang:	33717
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Development of CMOS-MEMS/NEMS Devices

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