Fracture Toughness of Freestanding Metallic Thin Films Studied by Bulge Testing
Metallic thin films are nowadays frequently used as key components in microelectronic and microelectromechanical systems, so that the functionalities of these systems often depend on the structural integrity of the incorporated thin films. As a result, the fracture toughness of thin films becomes a...
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| Médium: | Online |
| Jazyk: | angličtina |
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FAU University Press
2025
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| Témata: | |
| On-line přístup: | ONIX_20250828T094736_9783961471188_21 |
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