Chemical Vapor Deposition for Nanotechnology

Chemical vapor deposition (CVD) techniques have played a major role in the development of modern technology, and the rise of nanotechnology has further increased their importance, thanks to techniques such as atomic layer deposition (ALD) and vapor liquid solid growth, which are able to control the...

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Bibliografische gegevens

Formaat:	Online
Taal:	Engels
Gepubliceerd in:	IntechOpen 2023
Onderwerpen:	graphene, thin films, polymers, plasma, evaporation, growth mechanism thema EDItEUR::T Technology, Engineering, Agriculture, Industrial processes::TG Mechanical engineering and materials::TGM Materials science
Online toegang:	ONIX_20231201_9781789849615_1814
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