High-speed surface profilometry based on an adaptive microscope with axial chromatic encoding

An adaptive microscope with axial chromatic encoding is designed and developed, namely the AdaScope. With the ability to confocally address any locations within the measurement volume, the AdaScope provides the hardware foundation for a cascade measurement strategy to be developed, dramatically acce...

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Bibliographic Details

Main Author:	Luo, Ding
Format:	Online
Language:	English
Published:	KIT Scientific Publishing 2021
Subjects:	chromatisch konfokal 3D Messtechnik Mikroskopie chromatic confocal 3D measurement technology microscopy thema EDItEUR::U Computing and Information Technology::UY Computer science::UYA Mathematical theory of computation::UYAM Maths for computer scientists bic Book Industry Communication::U Computing & information technology::UY Computer science::UYA Mathematical theory of computation::UYAM Maths for computer scientists
Online Access:	ONIX_20210527_9783731510611_13
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