Superconducting Multilayer Technology for Josephson Devices : Technology, Engineering, Physics, Applications
Within this book fabrication processes for high-quality Josephson junctions based on niobium and aluminum oxide as well as niobium nitride and aluminum nitride on various substrates are discussed. Techniques for achieving a planar chip topography and sub-µm lateral dimensions, aiding the realization...
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| 主要作者: | |
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| 格式: | Online |
| 語言: | 英语 |
| 出版: |
KIT Scientific Publishing
2021
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| 主題: | |
| 在線閱讀: | 34295 |
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