3D Printing of MEMS Technology

Three-dimensional printing is among the emerging technologies of our time. While it was previously primarily employed for rapid prototyping, this technology has entered a phase of accelerated production, especially for complicated or small objects. Most recently, novel 3D printing technologies have...

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Publicado em: MDPI - Multidisciplinary Digital Publishing Institute 2024
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collection Directory of Open Access Books
description Three-dimensional printing is among the emerging technologies of our time. While it was previously primarily employed for rapid prototyping, this technology has entered a phase of accelerated production, especially for complicated or small objects. Most recently, novel 3D printing technologies have enabled objects with features at the micro- or even nano-scale to be fabricated. Meanwhile, well-known problems such as the waviness of fused deposition modeling (FDM)-printed parts, the missing long-term stability of some typical printing materials or the reduced mechanical properties of 3D-printed objects persist.This Special Issue focusses on all topics related to the 3D printing of micro-electro-mechanical systems (MEMS), such as novel or advanced features enabled by 3D printing compared to conventional technologies, but also the challenges that continue to exist regarding the application of 3D printing technologies for MEMS and new approaches to overcoming them.
format Online
id doab-20.500.12854ir-132410
institution Directory of Open Access Books
language eng
publishDate 2024
publishDateRange 2024
publishDateSort 2024
publisher MDPI - Multidisciplinary Digital Publishing Institute
publisherStr MDPI - Multidisciplinary Digital Publishing Institute
record_format ojs
spelling doab-20.500.12854ir-1324102024-04-11T15:11:01Z 3D Printing of MEMS Technology Ehrmann, Andrea 3D printing microelectromechanical systems (MEMS) microelectronics microfluidics microsensors microactuators inkjet printing zinc oxide heat treatment micro-heater semiconductor 2D printhead thermal inkjet thin-film resistors digital light processing projection micro-stereolithography micro beam fabrication additive manufacturing technology powder bed fusion surface geometrical parameters (SGP) lathe chuck jaws polymethylmethacrylate additive manufacturing fused deposition modeling passive pipeline pressure reactive impedance sensor structural health monitoring wireless DNA printing flow estimation MEMS ferrite materials magnetic thin films strontium ferrite nanomaterial relative permeability relative permittivity thermopneumatic micro actuator soft bellows actuator independent actuation polydimethylsiloxane standalone aerosol jet printing dielectric etching polyvinyl alcohol (PVA), polymers sacrificial material micro-electro-mechanical-system (MEMS) lithium niobate microring resonator silicon nitride waveguide photolithography assisted chemo-mechanical etching colorimetric device organophosphorus pesticide residues LCD mask photo-curing PolyJet 3D printing fidelity of 3D printing n/a thema EDItEUR::T Technology, Engineering, Agriculture, Industrial processes::TB Technology: general issues thema EDItEUR::T Technology, Engineering, Agriculture, Industrial processes::TB Technology: general issues::TBX History of engineering and technology thema EDItEUR::T Technology, Engineering, Agriculture, Industrial processes::TG Mechanical engineering and materials::TGM Materials science Three-dimensional printing is among the emerging technologies of our time. While it was previously primarily employed for rapid prototyping, this technology has entered a phase of accelerated production, especially for complicated or small objects. Most recently, novel 3D printing technologies have enabled objects with features at the micro- or even nano-scale to be fabricated. Meanwhile, well-known problems such as the waviness of fused deposition modeling (FDM)-printed parts, the missing long-term stability of some typical printing materials or the reduced mechanical properties of 3D-printed objects persist.This Special Issue focusses on all topics related to the 3D printing of micro-electro-mechanical systems (MEMS), such as novel or advanced features enabled by 3D printing compared to conventional technologies, but also the challenges that continue to exist regarding the application of 3D printing technologies for MEMS and new approaches to overcoming them. 2024-01-08T14:48:18Z 2024-01-08T14:48:18Z 2023 book ONIX_20240108_9783036597706_69 9783036597706 9783036597713 https://directory.doabooks.org/handle/20.500.12854/132410 eng application/octet-stream Attribution 4.0 International https://mdpi.com/books/pdfview/book/8445 https://mdpi.com/books/pdfview/book/8445 MDPI - Multidisciplinary Digital Publishing Institute 10.3390/books978-3-0365-9771-3 10.3390/books978-3-0365-9771-3 46cabcaa-dd94-4bfe-87b4-55023c1b36d0 9783036597706 9783036597713 194 Basel open access
spellingShingle 3D printing
microelectromechanical systems (MEMS)
microelectronics
microfluidics
microsensors
microactuators
inkjet printing
zinc oxide
heat treatment
micro-heater
semiconductor
2D printhead
thermal inkjet
thin-film resistors
digital light processing
projection micro-stereolithography
micro beam
fabrication
additive manufacturing technology
powder bed fusion
surface geometrical parameters (SGP)
lathe chuck jaws
polymethylmethacrylate
additive manufacturing
fused deposition modeling
passive
pipeline
pressure
reactive impedance sensor
structural health monitoring
wireless
DNA printing
flow estimation
MEMS
ferrite materials
magnetic thin films
strontium ferrite nanomaterial
relative permeability
relative permittivity
thermopneumatic
micro actuator
soft bellows actuator
independent actuation
polydimethylsiloxane
standalone
aerosol jet printing
dielectric
etching
polyvinyl alcohol (PVA), polymers
sacrificial material
micro-electro-mechanical-system (MEMS)
lithium niobate microring resonator
silicon nitride waveguide
photolithography assisted chemo-mechanical etching
colorimetric device
organophosphorus pesticide residues
LCD mask photo-curing
PolyJet 3D printing
fidelity of 3D printing
n/a
thema EDItEUR::T Technology, Engineering, Agriculture, Industrial processes::TB Technology: general issues
thema EDItEUR::T Technology, Engineering, Agriculture, Industrial processes::TB Technology: general issues::TBX History of engineering and technology
thema EDItEUR::T Technology, Engineering, Agriculture, Industrial processes::TG Mechanical engineering and materials::TGM Materials science
3D Printing of MEMS Technology
title 3D Printing of MEMS Technology
title_full 3D Printing of MEMS Technology
title_fullStr 3D Printing of MEMS Technology
title_full_unstemmed 3D Printing of MEMS Technology
title_short 3D Printing of MEMS Technology
title_sort 3d printing of mems technology
topic 3D printing
microelectromechanical systems (MEMS)
microelectronics
microfluidics
microsensors
microactuators
inkjet printing
zinc oxide
heat treatment
micro-heater
semiconductor
2D printhead
thermal inkjet
thin-film resistors
digital light processing
projection micro-stereolithography
micro beam
fabrication
additive manufacturing technology
powder bed fusion
surface geometrical parameters (SGP)
lathe chuck jaws
polymethylmethacrylate
additive manufacturing
fused deposition modeling
passive
pipeline
pressure
reactive impedance sensor
structural health monitoring
wireless
DNA printing
flow estimation
MEMS
ferrite materials
magnetic thin films
strontium ferrite nanomaterial
relative permeability
relative permittivity
thermopneumatic
micro actuator
soft bellows actuator
independent actuation
polydimethylsiloxane
standalone
aerosol jet printing
dielectric
etching
polyvinyl alcohol (PVA), polymers
sacrificial material
micro-electro-mechanical-system (MEMS)
lithium niobate microring resonator
silicon nitride waveguide
photolithography assisted chemo-mechanical etching
colorimetric device
organophosphorus pesticide residues
LCD mask photo-curing
PolyJet 3D printing
fidelity of 3D printing
n/a
thema EDItEUR::T Technology, Engineering, Agriculture, Industrial processes::TB Technology: general issues
thema EDItEUR::T Technology, Engineering, Agriculture, Industrial processes::TB Technology: general issues::TBX History of engineering and technology
thema EDItEUR::T Technology, Engineering, Agriculture, Industrial processes::TG Mechanical engineering and materials::TGM Materials science
topic_facet 3D printing
microelectromechanical systems (MEMS)
microelectronics
microfluidics
microsensors
microactuators
inkjet printing
zinc oxide
heat treatment
micro-heater
semiconductor
2D printhead
thermal inkjet
thin-film resistors
digital light processing
projection micro-stereolithography
micro beam
fabrication
additive manufacturing technology
powder bed fusion
surface geometrical parameters (SGP)
lathe chuck jaws
polymethylmethacrylate
additive manufacturing
fused deposition modeling
passive
pipeline
pressure
reactive impedance sensor
structural health monitoring
wireless
DNA printing
flow estimation
MEMS
ferrite materials
magnetic thin films
strontium ferrite nanomaterial
relative permeability
relative permittivity
thermopneumatic
micro actuator
soft bellows actuator
independent actuation
polydimethylsiloxane
standalone
aerosol jet printing
dielectric
etching
polyvinyl alcohol (PVA), polymers
sacrificial material
micro-electro-mechanical-system (MEMS)
lithium niobate microring resonator
silicon nitride waveguide
photolithography assisted chemo-mechanical etching
colorimetric device
organophosphorus pesticide residues
LCD mask photo-curing
PolyJet 3D printing
fidelity of 3D printing
n/a
thema EDItEUR::T Technology, Engineering, Agriculture, Industrial processes::TB Technology: general issues
thema EDItEUR::T Technology, Engineering, Agriculture, Industrial processes::TB Technology: general issues::TBX History of engineering and technology
thema EDItEUR::T Technology, Engineering, Agriculture, Industrial processes::TG Mechanical engineering and materials::TGM Materials science
url ONIX_20240108_9783036597706_69